SCANNING-X-RAY MICROSCOPE WITH 75-NM RESOLUTION

被引：65

作者：

RARBACK, H

SHU, D

FENG, SC

ADE, H

KIRZ, J

MCNULTY, I

KERN, DP

CHANG, THP

VLADIMIRSKY, Y

ISKANDER, N

ATTWOOD, D

MCQUAID, K

ROTHMAN, S

机构：

[1] SUNY STONY BROOK,DEPT PHYS,STONY BROOK,NY 11794

[2] IBM CORP,RES CTR,YORKTOWN HTS,NY 10598

[3] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,CTR XRAY OPT,BERKELEY,CA 94720

[4] UNIV CALIF SAN FRANCISCO,SCH MED & DENT,SAN FRANCISCO,CA 94132

来源：

关键词：

D O I：

10.1063/1.1139965

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：52 / 59

页数：8

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