SCANNING-X-RAY MICROSCOPE WITH 75-NM RESOLUTION

被引:65
作者
RARBACK, H
SHU, D
FENG, SC
ADE, H
KIRZ, J
MCNULTY, I
KERN, DP
CHANG, THP
VLADIMIRSKY, Y
ISKANDER, N
ATTWOOD, D
MCQUAID, K
ROTHMAN, S
机构
[1] SUNY STONY BROOK,DEPT PHYS,STONY BROOK,NY 11794
[2] IBM CORP,RES CTR,YORKTOWN HTS,NY 10598
[3] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,CTR XRAY OPT,BERKELEY,CA 94720
[4] UNIV CALIF SAN FRANCISCO,SCH MED & DENT,SAN FRANCISCO,CA 94132
关键词
D O I
10.1063/1.1139965
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:52 / 59
页数:8
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