SYNTHETIC CONTROL OF SOLID-SOLID INTERFACES - ANALYSIS OF 3 NEW SILICON SILICON-OXIDE INTERFACES BY SOFT-X-RAY PHOTOEMISSION

被引:49
作者
LEE, S
MAKAN, S
HOLL, MMB
MCFEELY, FR
机构
[1] BROWN UNIV,DEPT CHEM,PROVIDENCE,RI 02912
[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1021/ja00105a023
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Three new silicon/silicon oxide interfaces have been synthesized using the spherosiloxane clusters H-8-Si8O12, H12Si12O18, H14Si14O21, and Si(100)-(2x1). The structure of the interfaces have been characterized by Si 2p core level photoemission spectroscopy. Reactions of H8Si8O12 with Si(111)-(7x7) and Ge(100)-(2x1) were also explored. The use of the cluster derived interfaces as spectroscopic models for thermal Si/SiO2 interfaces is discussed in terms of current methods for assigning photoemission spectra at solid/solid interfaces and the structural models proposed for the Si/SiO2 interface.
引用
收藏
页码:11819 / 11826
页数:8
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