EFFECTS OF DEPOSITION ANGLE ON PERPENDICULAR ANISOTROPY AND INTERNAL-STRESS IN EVAPORATED TBFECO FILMS

被引：1

作者：

LEE, YH

LEE, SS

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 12期

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D O I：

10.1063/1.342017

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：6803 / 6805

页数：3

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