MECHANISM OF THE DIRECT-CURRENT PLASMA DISCHARGE DECOMPOSITION OF DISILANE

被引:24
作者
LONGEWAY, PA
WEAKLIEM, HA
ESTES, RD
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D O I
10.1021/j150659a028
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:3282 / 3287
页数:6
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