ELECTRON OSCILLATION VELOCITY AND ELECTRIC-FIELD IN COLLISIONLESS RADIOFREQUENCY DISCHARGE PLASMAS

被引：6

作者：

POPOV, OA ^{[1
]}

GODYAK, VA ^{[1
]}

机构：

[1] GTE LIGHTING PROD,DANVERS,MA 01923

来源：

关键词：

D O I：

10.1063/1.336442

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1759 / 1761

页数：3

共 8 条

[1]

Godyak V. A., 1977, Soviet Physics - Technical Physics, V22, P461

[2]

Godyak V A, 1976, SOV J PLASMA PHYS, V2, P78

[3]

Godyak V A, 1976, SOV J PLASMA PHYS, V2, P560

[4]

Godyak V.A., 1979, SOV J PLASMA PHYS, V5, P227

[5]

GODYAK VA, 1972, SOV PHYS TECH PHYS-U, V16, P1073

[6] ELECTRICAL-PROPERTIES OF RF SPUTTERING SYSTEMS [J].

KELLER, JH ;

PENNEBAKER, WB .

PENNEBAKER, WB .

POPOV, OA ;

GODYAK, VA .