CORRELATION BETWEEN ION-BEAM-MODIFIED POLYIMIDE CONDUCTIVITY AND IMPLANTATION CONDITION - A RAMAN-SPECTROSCOPIC APPROACH

被引：18

作者：

XU, D

XU, XL

ZOU, SC

机构：

[1] Ion Beam Laboratory, Shanghai Institute of Metallury, Academia Sinica, Shanghai, 200050

来源：

MATERIALS LETTERS | 1991年 / 12卷 / 1-2期

关键词：

D O I：

10.1016/0167-577X(91)90048-B

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A Raman spectroscopic investigation is presented of the intrinsic relationship between the conductivity of ion-beam-modified polyimide films and irradiation parameters. It is concluded that increases in dose, beam current density, and target temperature facilitate the production of a modified film with a higher conductivity.

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页码：12 / 15

页数：4

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