FABRICATION TECHNOLOGY FOR LEAD-ALLOY JOSEPHSON DEVICES FOR HIGH-DENSITY INTEGRATED-CIRCUITS

被引:8
作者
IMAMURA, T
HOKO, H
TAMURA, H
YOSHIDA, A
SUZUKI, H
MOROHASHI, S
OHARA, S
HASUO, S
YAMAOKA, T
机构
关键词
D O I
10.1063/1.336437
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:1720 / 1748
页数:29
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