TEM INVESTIGATIONS ON PECVD-TITANIUM CARBIDE LAYERS

TiC(x)-PECVD-layers were characterized by TEM, EDX analysis and electron diffraction. TiC(x)-layers deposited using benzene showed a columnar structure, at which the column size decreases with rising excess carbon content. TiC(x)-layers deposited using n-heptane presented a lamellar structure, at which the lamellar thickness diminishes with an increasing excess carbon content. In dependence on the layer thickness a periodic progress of the element contents was observed, at which a maximum for Ti and Cl correlates with a minimum for C. It was found that the incorporated chlorine is bonded to titanium. The lattice parameter depends on the chlorine content. Using TiCl4/H-2/Ar-as mixtures without any hydrocarbon, layers containing TiH2 are formed.