AUTOMATED MASK INSPECTION SYSTEM-AMIS

被引：23

作者：

BRUNING, JH ^{[1
]}

FELDMAN, M ^{[1
]}

KINSEL, TS ^{[1
]}

SITTIG, EK ^{[1
]}

TOWNSEND, RL ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1109/T-ED.1975.18167

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：487 / 495

页数：9

共 17 条

[1]

BESTENREINER F, 1970, OPTIK, V30, P404

[2]

CUTHBERT JD, COMMUNICATION

[3]

CUTHBERT JD, TO BE PUBLISHED

[4] OPTICAL CONSIDERATIONS FOR AN ACOUSTOOPTIC DEFLECTOR [J].

DICKSON, LD .

APPLIED OPTICS, 1972, 11 (10) :2196-&

[5]

GARLAND LH, 1964, AM J ROENTGEN, P1950

[6]

HEINZ RA, 1973, WESTERN ELECTR ENG, V17, P39

[7]

KUNSTMANN P, 1971, OPT COMMUN, V4, P404

[8]

LUECHEN J, 1968, KODAK PHOTORESIST SE, V2

[9] COST-SIZE OPTIMA OF MONOLITHIC INTEGRATED CIRCUITS [J].

MURPHY, BT .

[10] A NEW LOOK AT YIELD OF INTEGRATED CIRCUITS [J].

PRICE, JE .

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1970, 58 (08) :1290-&