ESTIMATION OF ARRHENIUS PARAMETERS FOR THE 1,1 ELIMINATION OF H-2 FROM SI2H6 AND THE ROLE OF CHEMICALLY ACTIVATED DISILANE IN SILANE PYROLYSIS

被引：41

作者：

MOFFAT, HK ^{[1
]}

JENSEN, KF ^{[1
]}

CARR, RW ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT CHEM ENGN & MAT SCI,MINNEAPOLIS,MN 55455

来源：

JOURNAL OF PHYSICAL CHEMISTRY | 1992年 / 96卷 / 19期

关键词：

D O I：

10.1021/j100198a039

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Arrhenius parameters for the 1,1 H2 elimination from disilane are estimated. Chemically activated disilane should play a significant role in the high-temperature pyrolysis of silanes, such as the shock tube dissociation of SiH4 and the atmospheric pressure silicon CVD from a SiH4 source. Estimates for DELTA-H-degrees(f,298)(H3SiSiH) are also made that are consistent with those Arrhenius parameters.

引用

页码：7695 / 7703

页数：9

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