STUDIES OF DISSOLUTION PHENOMENA IN MICROLITHOGRAPHY

被引:25
作者
KRASICKY, PD [1 ]
GROELE, RJ [1 ]
JUBINSKY, JA [1 ]
RODRIGUEZ, F [1 ]
NAMASTE, YMN [1 ]
OBENDORF, SK [1 ]
机构
[1] CORNELL UNIV,DEPT DESIGN & ENVIRONM ANAL,ITHACA,NY 14853
关键词
D O I
10.1002/pen.760270408
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
4
引用
收藏
页码:282 / 285
页数:4
相关论文
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POLYMER, 1985, 26 (07) :1069-1072
[2]   INSITU MEASUREMENT OF DIELECTRIC THICKNESS DURING ETCHING OR DEVELOPING PROCESSES [J].
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RODRIGUEZ F, 1985, P SOC PHOTO-OPT INST, V539, P14, DOI 10.1117/12.947809
[4]  
RODRIGUEZ F, 1985, SOLID STATE TECHNOL, V28, P125