DETERMINATION OF NITROGEN USING THE N-14(ALPHA, P)O-17 NUCLEAR-REACTION

被引：12

作者：

LIN, Z

MCINTYRE, LC

LEAVITT, JA

ASHBAUGH, MD

COX, RP

机构：

[1] Department of Physics, University of Arizona, Tucson

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 79卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(93)95398-O

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A technique for quantifying nitrogen in thin films using the (N(alpha,p)O)-N-14-O-17 reaction is reported. An incident alpha particle beam with energy near 3.9 MeV is used and emitted protons are detected at a lab angle of 135-degrees. A 15 mum Kapton foil is placed over the detector to stop elastically scattered alpha particles. A thin film containing a known areal density of nitrogen is used for calibration. We present relative yield data on protons from the (N(alpha,p0)O)-N-14-O-17 reaction at 135-degrees lab angle from 3.4 MeV to 4.0 MeV as well as an example of the application of this technique in determining nitrogen content in thin films, Possible interfering reactions, particularly (Si(alpha,p)P)-Si-28-P-31 are also discussed.

引用

页码：498 / 500

页数：3

共 13 条

[1] NITROGEN PROFILING IN NITRIDE FILMS AND NITROGEN-IMPLANTED SAMPLES USING THE N-14(ALPHA,ALPHA) AND N-14(ALPHA,P) REACTIONS AT 6 MEV INCIDENT ENERGY [J].