RECONSTRUCTION OF THE DEPTH PROFILE FROM ANGLE-RESOLVED AES XPS

被引:26
作者
DWYER, VM
机构
[1] Department of Electronic and Electrical Engineering, Loughborough University of Technology, Loughborough
关键词
D O I
10.1002/sia.740200813
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The effects of elastic scattering on the information available from angle-resolved electron spectroscopies on non-crystalline materials is studied. These effects force the consideration of elastic scattering cross-sections which are dependent on atomic concentration and therefore on depth. This is done by discretizing the transport equation within a two-stream/transport approximation. The variation of inelastic mean free paths with composition is also included. It is also pointed out that, in addition to the ill-conditioning problems and the possible numerical non-uniqueness, the inversion of the Laplace transform required for reconstruction of the depth profile introduces a second analytical non-uniqueness. it is suggested that the reconstruction of the depth profile should be performed using a high-energy peak to obtain an approximate depth profile (large inelastic mean free path, high depth penetration) and that the full quantification should be performed on a low-energy peak (small inelastic mean free path, low depth penetration).
引用
收藏
页码:687 / 695
页数:9
相关论文
共 31 条
[21]   ELECTRON MEAN-FREE-PATH CALCULATIONS USING A MODEL DIELECTRIC FUNCTION [J].
PENN, DR .
PHYSICAL REVIEW B, 1987, 35 (02) :482-486
[22]   QUANTITATIVE CHEMICAL-ANALYSIS BY ESCA [J].
PENN, DR .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1976, 9 (01) :29-40
[23]   ENERGY AND MATERIAL DEPENDENCE OF THE INELASTIC MEAN FREE-PATH OF LOW-ENERGY ELECTRONS IN SOLIDS [J].
POWELL, CJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :1338-1342
[24]  
Riley M. E., 1975, Atomic Data and Nuclear Data Tables, V15, P443, DOI 10.1016/0092-640X(75)90012-1
[25]  
Seah M. P., 1979, Surface and Interface Analysis, V1, P2, DOI 10.1002/sia.740010103
[26]   MAXIMUM-ENTROPY - A NEW APPROACH TO NONDESTRUCTIVE DECONVOLUTION OF DEPTH PROFILES FROM ANGLE-DEPENDENT XPS [J].
SMITH, GC ;
LIVESEY, AK .
SURFACE AND INTERFACE ANALYSIS, 1992, 19 (1-12) :175-180
[27]   ELASTIC AND INELASTIC-SCATTERING OF ELECTRONS REFLECTED FROM SOLIDS - EFFECTS ON ENERGY-SPECTRA [J].
TOFTERUP, AL .
PHYSICAL REVIEW B, 1985, 32 (05) :2808-2818
[28]  
TOUGAARD S, 1982, PHYS REV B, V25, P4452, DOI 10.1103/PhysRevB.25.4452
[29]   A NEW FORMALISM FOR ANGLE-RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY (ARXPS) AND AUGER-ELECTRON SPECTROSCOPY (ARAES) OF NONCRYSTALLINE SOLIDS TAKING ELASTIC ELECTRON-SCATTERING INTO ACCOUNT [J].
WERNER, WSM ;
STORI, H .
SURFACE AND INTERFACE ANALYSIS, 1992, 19 (1-12) :83-88
[30]   ANALYTICAL EXPRESSION DESCRIBING THE ATTENUATION OF AUGER ELECTRONS AND PHOTOELECTRONS IN SOLIDS [J].
WERNER, WSM ;
GRIES, WH ;
STORI, H .
SURFACE AND INTERFACE ANALYSIS, 1991, 17 (10) :693-704