TIC AMORPHIZATION UNDER H IMPLANTATION AT LOW-TEMPERATURE

被引:14
作者
FOURNIER, D [1 ]
RUAULT, MO [1 ]
SAINTJACQUES, RG [1 ]
机构
[1] CTR SPECTROMETRIE NUCL & SPECTROMETRIE MASSE, F-91406 ORSAY, FRANCE
关键词
D O I
10.1016/S0168-583X(87)80111-8
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:559 / 562
页数:4
相关论文
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