POLYCRYSTALLINE SILICON-BASED SENSORS

被引：32

作者：

LUDER, E

机构：

来源：

SENSORS AND ACTUATORS | 1986年 / 10卷 / 1-2期

关键词：

D O I：

10.1016/0250-6874(86)80032-4

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：9 / 23

页数：15

共 31 条

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[7]

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[9] RECRYSTALLIZATION OF SI ON INSULATING SUBSTRATES BY USING INCOHERENT-LIGHT SOURCES [J].

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[10] THE EFFECTS OF LINEAR STRAIN ON THE ELECTRONIC-PROPERTIES OF GLOW-DISCHARGE AMORPHOUS-SILICON [J].

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