MEASUREMENT OF ADHESION OF THIN-FILMS

被引：68

作者：

JACOBSSON, R ^{[1
]}

机构：

[1] AGA OPTICAL,S-18302 TABY 2,SWEDEN

来源：

THIN SOLID FILMS | 1976年 / 34卷 / 02期

关键词：

D O I：

10.1016/0040-6090(76)90454-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：191 / 199

页数：9

相关论文

共 17 条

[1] SIMPLE, RAPID SPUTTERING APPARATUS
BELSER, RB
HICKLIN, WH
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1956, 27 (05) : 293 - 296
[2] Butler D. W., 1970, Journal of Physics E (Scientific Instruments), V3, P979, DOI 10.1088/0022-3735/3/12/307
[3] STYLUS OR SCRATCH METHOD FOR THIN FILM ADHESION MEASUREMENT - SOME OBSERVATIONS AND COMMENTS
BUTLER, DW
STODDART, CT
STUART, PR
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1970, 3 (06) : 877 - &
[4] CAMPBELL DS, 1970, HDB THIN FILM TECHNO, pCH12
[5] THIN-FILM ADHESION
CHAPMAN, BN
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 106 - 113
[6] INTERFACE AND ADHESION STUDIES OF EVAPORATED SE ON OXIDE SURFACES
CHIANG, YS
ING, SW
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (05): : 809 - &
[7] EFFECT OF ION BOMBARDMENT ON ADHESION OF ALUMINIUM FILMS ON GLASS
COLLINS, LE
PERKINS, JG
STROUD, PT
[J]. THIN SOLID FILMS, 1969, 4 (01) : 41 - &
[8] DETERMINING OPTIMAL PARAMETERS FOR ADHESION MEASUREMENT USING A POINT-ENGRAVING METHOD
HAMERSKY, J
[J]. THIN SOLID FILMS, 1969, 3 (04) : 263 - &
[9] SOME FACTORS INFLUENCING THE ADHESION OF FILMS PRODUCED BY VACUUM EVAPORATION
HEAVENS, OS
[J]. JOURNAL DE PHYSIQUE ET LE RADIUM, 1950, 11 (07): : 355 - 360
[10] MEASUREMENT OF ADHESION OF THIN EVAPORATED FILMS ON GLASS SUBSTRATES BY MEANS OF DIRECT PULL METHOD
JACOBSSON, R
KRUSE, B
[J]. THIN SOLID FILMS, 1973, 15 (01) : 71 - 77