SIMPLE, RAPID SPUTTERING APPARATUS

[1] BACHMAN CH, 1948, TECHNIQUES EXPT ELEC, P116

[2] BARTLETT RS, 1928, PHIL MAG, V5, P858

[3] BELSER RB, 1953, PHYS REV, V92, P1098

[4] BELSER RB, 1954, PHYS REV, V95, P307

[5] A TECHNIQUE OF SOLDERING TO THIN METAL FILMS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1954, 25 (02) : 180 - 183

[6] Crookes W., 1891, P R SOC LONDON, V50, P88

[7] GROVE WR, 1952, T ROY SOC LONDON, V1, P87

[8] The preparation of sputtered metal films [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1934, 5 (02) : 85 - 88

[9] MASSEY HSW, 1952, ELECTRON IONIC IMP, P578

[10] On the electrical properties of thin metal films [J]. PHILOSOPHICAL MAGAZINE, 1902, 4 (19-24) : 652 - 678

[1] BACHMAN CH, 1948, TECHNIQUES EXPT ELEC, P116

[2] BARTLETT RS, 1928, PHIL MAG, V5, P858

[3] BELSER RB, 1953, PHYS REV, V92, P1098

[4] BELSER RB, 1954, PHYS REV, V95, P307

[5] A TECHNIQUE OF SOLDERING TO THIN METAL FILMS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1954, 25 (02) : 180 - 183

[6] Crookes W., 1891, P R SOC LONDON, V50, P88

[7] GROVE WR, 1952, T ROY SOC LONDON, V1, P87

[8] The preparation of sputtered metal films [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1934, 5 (02) : 85 - 88

[9] MASSEY HSW, 1952, ELECTRON IONIC IMP, P578

[10] On the electrical properties of thin metal films [J]. PHILOSOPHICAL MAGAZINE, 1902, 4 (19-24) : 652 - 678