SIMPLE, RAPID SPUTTERING APPARATUS

[11] Penning FM, 1940, P K NED AKAD WETENSC, V43, P41

[12] Pogany B, 1916, ANN PHYS-BERLIN, V49, P531

[13] PRINGSHEIM P, 1912, DTSCH PHYS GESELL VE, V14, P506

[14] STRONG J, 1938, PROCEDURES EXPT PHYS, P159

[15] Theory of cathode sputtering in low voltage gaseous discharges [J]. PHYSICAL REVIEW, 1944, 65 (11/12): : 319 - 327

[16] MOMENTUM TRANSFER IN SPUTTERING BY ION BOMBARDMENT [J]. JOURNAL OF APPLIED PHYSICS, 1954, 25 (02) : 270 - 271

[17] Wright, 1877, AM J SCI ARTS, V13, P49, DOI DOI 10.2475/AJS.S3-13.73.49

[18] Wright AW., 1877, AM J SCI, Vs3-14, P169, DOI [10.2475/ajs.s3-14.81.169, DOI 10.2475/AJS.S3-14.81.169]

[19] STANDARD FITTINGS DO

[11] Penning FM, 1940, P K NED AKAD WETENSC, V43, P41

[12] Pogany B, 1916, ANN PHYS-BERLIN, V49, P531

[13] PRINGSHEIM P, 1912, DTSCH PHYS GESELL VE, V14, P506

[14] STRONG J, 1938, PROCEDURES EXPT PHYS, P159

[15] Theory of cathode sputtering in low voltage gaseous discharges [J]. PHYSICAL REVIEW, 1944, 65 (11/12): : 319 - 327

[16] MOMENTUM TRANSFER IN SPUTTERING BY ION BOMBARDMENT [J]. JOURNAL OF APPLIED PHYSICS, 1954, 25 (02) : 270 - 271

[17] Wright, 1877, AM J SCI ARTS, V13, P49, DOI DOI 10.2475/AJS.S3-13.73.49

[18] Wright AW., 1877, AM J SCI, Vs3-14, P169, DOI [10.2475/ajs.s3-14.81.169, DOI 10.2475/AJS.S3-14.81.169]

[19] STANDARD FITTINGS DO