THE ELASTIC PROPERTIES OF ION-IMPLANTED SILICON

[1] Brekhovskikh L., 1980, APPL MATH MECH-ENGL, V2nd ed.

[2] BRIGGS GAD, 1985, INTRO SCANNING ACOUS

[3] AN INVESTIGATION OF ION IMPLANTATION-INDUCED NEAR-SURFACE STRESSES AND THEIR EFFECTS IN SAPPHIRE AND GLASS [J]. JOURNAL OF MATERIALS SCIENCE, 1985, 20 (12) : 4624 - 4646

[4] CHANGING THE SURFACE MECHANICAL-PROPERTIES OF SILICON AND ALPHA-AL2O3 BY ION-IMPLANTATION [J]. JOURNAL OF MATERIALS SCIENCE, 1984, 19 (11) : 3524 - 3545

[5] SURFACE SOFTENING IN SILICON BY ION-IMPLANTATION [J]. JOURNAL OF MATERIALS SCIENCE, 1984, 19 (03) : 845 - 860

[6] BURNETT PJ, 1984, THESIS U CAMBRIDGE

[7] BURNETT PJ, 1986, I PHYS C SER, V75

[8] Carter G., 1976, ION IMPLANTATION SEM

[9] DISPLACEMENT CRITERION FOR AMORPHIZATION OF SILICON DURING ION-IMPLANTATION [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (12) : 7143 - 7146

[10] COMPARATIVE-STUDY OF ANNEALED NEON-ION, ARGON-ION, AND KRYPTON-ION IMPLANTATION DAMAGE IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (10) : 5188 - 5198

[1] Brekhovskikh L., 1980, APPL MATH MECH-ENGL, V2nd ed.

[2] BRIGGS GAD, 1985, INTRO SCANNING ACOUS

[3] AN INVESTIGATION OF ION IMPLANTATION-INDUCED NEAR-SURFACE STRESSES AND THEIR EFFECTS IN SAPPHIRE AND GLASS [J]. JOURNAL OF MATERIALS SCIENCE, 1985, 20 (12) : 4624 - 4646

[4] CHANGING THE SURFACE MECHANICAL-PROPERTIES OF SILICON AND ALPHA-AL2O3 BY ION-IMPLANTATION [J]. JOURNAL OF MATERIALS SCIENCE, 1984, 19 (11) : 3524 - 3545

[5] SURFACE SOFTENING IN SILICON BY ION-IMPLANTATION [J]. JOURNAL OF MATERIALS SCIENCE, 1984, 19 (03) : 845 - 860

[6] BURNETT PJ, 1984, THESIS U CAMBRIDGE

[7] BURNETT PJ, 1986, I PHYS C SER, V75

[8] Carter G., 1976, ION IMPLANTATION SEM

[9] DISPLACEMENT CRITERION FOR AMORPHIZATION OF SILICON DURING ION-IMPLANTATION [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (12) : 7143 - 7146

[10] COMPARATIVE-STUDY OF ANNEALED NEON-ION, ARGON-ION, AND KRYPTON-ION IMPLANTATION DAMAGE IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (10) : 5188 - 5198