EPITAXIAL-GROWTH OF OPTICAL WAVE-GUIDING LITAO3 FILMS BY EXCIMER-LASER ABLATION

被引：17

作者：

LIU, JM ^{[1
]}

LIU, ZG ^{[1
]}

ZHANG, MS ^{[1
]}

ZHU, SN ^{[1
]}

WU, ZC ^{[1
]}

机构：

[1] NANJING UNIV,DEPT PHYS,NANJING 210008,PEOPLES R CHINA

来源：

JOURNAL OF PHYSICS-CONDENSED MATTER | 1994年 / 6卷 / 28期

关键词：

D O I：

10.1088/0953-8984/6/28/015

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Waveguiding epitaxial LiTaO3 films have been prepared on sapphire substrates by the excimer laser ablation technique. The as-grown films were characterized by Raman scattering, XRD and SEM techniques, which revealed that epitaxial (001)-oriented and (012)-oriented LiTaO3 films with small surface roughness were achieved on sapphire (001) and (012) substrates, respectively. Optical waveguiding properties were demonstrated by m-line measurement of TM and TE multimodes.

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页码：5409 / 5414

页数：6

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