ION-IMPLANTATION IN IV-VI SEMICONDUCTORS

被引:51
作者
PALMETSHOFER, L
机构
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1984年 / 34卷 / 03期
关键词
D O I
10.1007/BF00616910
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:139 / 153
页数:15
相关论文
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