THIN METAL-FILM OXIDE SEMICONDUCTOR STRUCTURES WITH TEMPERATURE-DEPENDENT SENSITIVITY FOR UNSATURATED-HYDROCARBONS

被引：9

作者：

WINQUIST, F

LUNDSTROM, I

机构：

[1] Laboratory of Applied Physics, Linköping Institute of Technology, 581 83 Linköping, Sweden

来源：

SENSORS AND ACTUATORS | 1987年 / 12卷 / 03期

关键词：

We are grateful to Mrs Anita Spetz for the fabncatlon of the test structures used III our expenments This work has been supported by grants from the National Swedish Board for Technmd Development;

D O I：

10.1016/0250-6874(87)80039-2

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：255 / 261

页数：7