PREPARATION AND PROPERTIES OF RF-SPUTTERED POLYMER METAL THIN-FILMS

被引:49
作者
ROY, RA
MESSIER, R
KRISHNASWAMY, SV
机构
关键词
D O I
10.1016/0040-6090(83)90028-7
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:27 / 35
页数:9
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