COMBINED GAS MICROFLOWMETER AND POTENTIOMETRIC SENSOR

被引：1

作者：

DOMANSKY, K

JANATA, J

机构：

[1] Environmental Molecular Sciences Laboratory, Pacific Northwest Laboratory, Richland, WA

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 9A期

关键词：

GAS MICROFLOWMETER; POTENTIOMETRIC SENSOR; SGFET; TEMPERATURE PROFILING; INFRARED MICROSCOPY;

D O I：

10.1143/JJAP.34.5054

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A gas microflowmeter based on a potentiometric chemical sensor is demonstrated. The flowmeter operates on the hot-wire principle, Electric current is passed through a platinum microbridge. A preset bridge resistance is kept constant by regulating the heating current. By measuring the changes in the heating current, the calibration flow curve can be obtained. The temperature profiles of both the electrically heated microbridge and the substrate in its vicinity, measured with an infrared microscope, are presented.

引用

页码：5054 / 5055

页数：2