RESONANCE WAVE DISCHARGE AND COLLISIONAL ENERGY-ABSORPTION IN HELICON PLASMA SOURCE

被引:89
作者
SHAMRAI, KP
TARANOV, VB
机构
[1] Inst. of Nucl. Res., Acad. of Sci., Kiev
关键词
D O I
10.1088/0741-3335/36/11/002
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The concept of the 'resonance' wave discharge is introduced to explain the high absorption efficiency of inductively coupled helicon plasma source. This discharge is supported by long-scale weakly damped eigenmodes' excited in plasma resonator. The rf power absorbed in it is inversely proportional to electron collision frequency. The fields excited by simple single-loop inner antenna and its impedance are calculated in a cylindrical metal resonator. At low collision frequencies the field amplitudes and antenna resistance are shown to peak sharply near the helicon dispersion branches.
引用
收藏
页码:1719 / 1735
页数:17
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