ALUMINUM IMPLANTATIONS IN COPPER

被引：3

作者：

LIGTHART, HJ

GERRITSEN, E

VANDENKERKHOFF, PJ

HOEKSTRA, S

VANDELEEST, RE

KEETELS, E

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷

关键词：

D O I：

10.1016/S0168-583X(87)80044-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：209 / 212

页数：4

共 9 条

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[2]

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[5] THE INFLUENCE OF ION-IMPLANTATION ON THE THERMAL-OXIDATION OF COPPER [J].

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COLLINS, RA .

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[6] CORROSION INHIBITION BY ION-IMPLANTATION OF AL OR MG IN CU, INVESTIGATED BY RBS [J].

SVENDSEN, LG ;

BORGESEN, P .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3) :141-145

[7] LATTICE DAMAGE IN SINGLE-CRYSTALS OF CU AFTER SELF-IMPLANTATION STUDIED BY CHANNELING [J].

VOS, M ;

BOERMA, DO .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :337-340

[8] ULTRAMICROINDENTATION APPARATUS FOR THE MECHANICAL CHARACTERIZATION OF THIN-FILMS [J].

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FRANKEN, AJJ .

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[9]

ZHOU PD, 1983, NUCL INSTRUM METHODS, V209, P841

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