THE SPUTTER DEPOSITION OF PRECISION METAL MULTILAYERS

被引：10

作者：

SOMEKH, RE

HUANG, KH

SHIH, WC

机构：

来源：

VACUUM | 1988年 / 38卷 / 8-10期

关键词：

D O I：

10.1016/0042-207X(88)90444-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：693 / 697

页数：5

共 21 条

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