ELECTRICAL CHARACTERISTICS OF RF-SPUTTERED SINGLE-CRYSTAL NIOBIUM FILMS

被引：107

作者：

MAYADAS, AF

LAIBOWITZ, RB

CUOMO, JJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1972年 / 43卷 / 03期

关键词：

D O I：

10.1063/1.1661258

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1287 / +

页数：1

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共 12 条

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MAYADAS, AF
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[J]. PHYSICAL REVIEW B, 1970, 1 (04): : 1382 - &
[8] SONDHEIMER EH, 1950, ADV PHYS, V1, P1
[9] DEPOSITION OF NIOBIUM THIN FILMS BY DC DIODE AND SUBSTRATE BIAS SPUTTERING
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[10] SUPERCONDUCTIVITY OF NIOBIUM THIN FILMS DEPOSITED BY DC DIODE SPUTTERING
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