ALUMINUM FILMS DEPOSITED BY RF SPUTTERING

[1] Castro P. L., 1969, Ohmic contacts to semiconductors, P332

[2] SUPERCONDUCTING TRANSITION IN ALUMINUM [J]. PHYSICAL REVIEW, 1958, 111 (01): : 132 - 142

[3] COOK HC, 1966, T METALL SOC AIME, V236, P314

[4] PRECISE LATTICE CONSTANTS OF GERMANIUM, ALUMINUM, GALLIUM ARSENIDE, URANIUM, SULPHUR, QUARTZ AND SAPPHIRE [J]. ACTA CRYSTALLOGRAPHICA, 1962, 15 (JUN): : 578 - &

[5] DIELECTRIC THIN FILMS THROUGH RF SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1966, 37 (02) : 574 - &

[6] THEORY AND PRACTICE OF RF SPUTTERING [J]. VACUUM, 1967, 17 (03) : 139 - &

[7] DETERMINATION OF STRESS IN FILMS ON SINGLE CRYSTALLINE SILICON SUBSTRATES [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1965, 36 (01) : 7 - +

[8] GLANG R, 1965, 3 T INT VAC C 3, V2, P643

[9] HEURLE FM, 1966, T AIME, V236, P321

[10] HEURLE FM, 1968, T METALL SOC AIME, V242, P502

[1] Castro P. L., 1969, Ohmic contacts to semiconductors, P332

[2] SUPERCONDUCTING TRANSITION IN ALUMINUM [J]. PHYSICAL REVIEW, 1958, 111 (01): : 132 - 142

[3] COOK HC, 1966, T METALL SOC AIME, V236, P314

[4] PRECISE LATTICE CONSTANTS OF GERMANIUM, ALUMINUM, GALLIUM ARSENIDE, URANIUM, SULPHUR, QUARTZ AND SAPPHIRE [J]. ACTA CRYSTALLOGRAPHICA, 1962, 15 (JUN): : 578 - &

[5] DIELECTRIC THIN FILMS THROUGH RF SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1966, 37 (02) : 574 - &

[6] THEORY AND PRACTICE OF RF SPUTTERING [J]. VACUUM, 1967, 17 (03) : 139 - &

[7] DETERMINATION OF STRESS IN FILMS ON SINGLE CRYSTALLINE SILICON SUBSTRATES [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1965, 36 (01) : 7 - +

[8] GLANG R, 1965, 3 T INT VAC C 3, V2, P643

[9] HEURLE FM, 1966, T AIME, V236, P321

[10] HEURLE FM, 1968, T METALL SOC AIME, V242, P502