THEORY AND PRACTICE OF RF SPUTTERING

[1] SPUTTERING OF DIELECTRICS BY HIGH-FREQUENCY FIELDS [J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (10) : 2991 - &

[2] AUGUSTA B, 1965, OCT EL DEV M WASH

[3] Butler H. S., 1961, 820 STANF U MICR LAB

[4] PLASMA SHEATH FORMATION BY RADIO-FREQUENCY FIELDS [J]. PHYSICS OF FLUIDS, 1963, 6 (09) : 1346 - 1355

[5] COOK HC, 1966, T METALL SOC AIME, V236, P314

[6] DIELECTRIC THIN FILMS THROUGH RF SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1966, 37 (02) : 574 - &

[7] DAVIDSE PD, 1965, 3 INT VAC C STUTTG

[8] DAVIDSE PD, 1965, 12 AVS NAT VAC S

[9] SOLID LOGIC TECHNOLOGY - VERSATILE HIGH-PERFORMANCE MICROELECTRONICS [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1964, 8 (02) : 102 - &

[10] FRIESER RG, 1965, SPR M EL SOC

[1] SPUTTERING OF DIELECTRICS BY HIGH-FREQUENCY FIELDS [J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (10) : 2991 - &

[2] AUGUSTA B, 1965, OCT EL DEV M WASH

[3] Butler H. S., 1961, 820 STANF U MICR LAB

[4] PLASMA SHEATH FORMATION BY RADIO-FREQUENCY FIELDS [J]. PHYSICS OF FLUIDS, 1963, 6 (09) : 1346 - 1355

[5] COOK HC, 1966, T METALL SOC AIME, V236, P314

[6] DIELECTRIC THIN FILMS THROUGH RF SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1966, 37 (02) : 574 - &

[7] DAVIDSE PD, 1965, 3 INT VAC C STUTTG

[8] DAVIDSE PD, 1965, 12 AVS NAT VAC S

[9] SOLID LOGIC TECHNOLOGY - VERSATILE HIGH-PERFORMANCE MICROELECTRONICS [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1964, 8 (02) : 102 - &

[10] FRIESER RG, 1965, SPR M EL SOC