SUBPICOSECOND KRF-STAR EXCIMER-LASER SOURCE

被引:92
作者
SCHWARZENBACH, AP
LUK, TS
MCINTYRE, IA
JOHANN, U
MCPHERSON, A
BOYER, K
RHODES, CK
机构
关键词
D O I
10.1364/OL.11.000499
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:499 / 501
页数:3
相关论文
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