A NEW INTERFEROMETRIC ALIGNMENT TECHNIQUE WITH HOLOGRAPHIC CONFIGURATION

被引：3

作者：

NOMURA, N

MATSUMURA, T

YONEZAWA, T

KUGIMIYA, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 11期

关键词：

D O I：

10.1143/JJAP.24.1555

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1555 / 1560

页数：6

共 8 条

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FLANDERS, DC ;

SMITH, HI ;

AUSTIN, S .

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FLANDERS, DC ;

ECONOMOU, NP ;

DEGRAFF, PD .

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[4]

Nomura N., 1984, 1984 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No. 84CH2061-0), P64

[5]

NOMURA N, 1983, 15TH C SOL STAT DEV, P34

[6]

TRUTNA WR, 1984, P SOC PHOTO-OPT INST, V470, P62, DOI 10.1117/12.941888

[7]

WEST PR, 1983, P SOC PHOTO-OPT INST, V394, P33, DOI 10.1117/12.935119

[8]

WITTEKOEK S, 1980, P SOC PHOTOOPTICAL I, V221, P2