ION-BEAM INDUCED CONDUCTIVITY AND STRUCTURAL-CHANGES IN DIAMOND-LIKE CARBON COATINGS

被引:31
作者
PRAWER, S [1 ]
KALISH, R [1 ]
ADEL, M [1 ]
RICHTER, V [1 ]
机构
[1] TECHNION ISRAEL INST TECHNOL,INST SOLID STATE,HAIFA,ISRAEL
关键词
D O I
10.1063/1.97452
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1157 / 1159
页数:3
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