XRD, XPS, OPTICAL AND ELECTRICAL STUDIES ON THE CONVERSION OF SNS THIN-FILMS TO SNO2

被引:40
作者
NAIR, PK [1 ]
NAIR, MTS [1 ]
ZINGARO, RA [1 ]
MEYERS, EA [1 ]
机构
[1] TEXAS A&M UNIV, DEPT CHEM, COLL STN, TX 77843 USA
关键词
D O I
10.1016/0040-6090(94)90112-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Results on the thermal decomposition of chemically deposited SnS thin films to sub-stoichiometric and near-stoichiometric SnO2 thin films on glass substrates are presented. The SnS-to-SnO2 conversion is illustrated using X-ray diffraction spectra, X-ray photoelectron spectroscopy (XPS), optical transmittance spectra and electrical characteristics. SnS thin films of approximately 0.7 mu m thickness and appearing deep red in transmission could be converted to transparent SnO2-x films at temperatures above 325 degrees C. It requires about 20 h at 350 degrees C, 2 h 45 min at 400 degrees C, 30 min at 450 degrees C or 10 min at 500 degrees C for the near-complete conversion, but a relatively thinner film (of 0.25 mu m) requires only about 30 min for the conversion at 400 degrees C. At the threshold of the transformation, the films show sheet resistance of about 10(4) Omega/square, which increases upon prolonged annealing to about 10(9) Omega/square for 18 h annealing at 500 degrees C. The ratio of dark sheet resistance to photo sheet resistance is about ten for SnS films under 600 W m(-2) tungsten-halogen light and is about 10(3) for SnO2 films.
引用
收藏
页码:85 / 92
页数:8
相关论文
共 17 条
[1]   UBER DIE VERFEINERUNG DER KRISTALLSTRUKTURBESTIMMUNG EINIGER VERTRETER DES RUTILTYPS - TIO2, SNO2, GEO2 UND MGF2 [J].
BAUR, WH .
ACTA CRYSTALLOGRAPHICA, 1956, 9 (05) :515-520
[2]   INFLUENCE OF ANNEALING ON THE PHASE-COMPOSITION, TRANSMISSION AND RESISTIVITY OF SNOX THIN-FILMS [J].
BEENSHMARCHWICKA, G ;
KROLSTEPNIEWSKA, L ;
MISIUK, A .
THIN SOLID FILMS, 1984, 113 (03) :215-224
[3]  
BUBE RH, 1960, PHOTOCONDUCTIVITY SO, P233
[4]  
CHAMBOULEYRON I, 1983, SOLAR ENERGY MATERIA, V8, P387
[5]  
Chopra K. L., 1982, PHYS THIN FILMS, V12, P167
[6]   CHARACTERIZATION OF AL-ALOX AND SN-SNOX CERMET FILMS DEPOSITED BY REACTIVE EVAPORATION [J].
DEMIRYONT, H ;
TEZEY, N .
THIN SOLID FILMS, 1983, 101 (04) :345-356
[7]  
Demiryont H., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V823, P36, DOI 10.1117/12.941866
[8]   LOW-TEMPERATURE CHEMICAL PRECIPITATION AND VAPOR-DEPOSITION OF SNXS THIN-FILMS [J].
ENGELKEN, RD ;
MCCLOUD, HE ;
LEE, C ;
SLAYTON, M ;
GHOREISHI, H .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (11) :2696-2707
[9]   ANNEALING EFFECT OF SNO2 FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION - EVIDENCE OF CHLORINE REMOVAL BY AUGER-ELECTRON SPECTROSCOPY AND RUTHERFORD BACKSCATTERING SPECTROMETRY STUDIES [J].
KIM, K ;
FINSTAD, TG ;
CHU, WK ;
COX, XB ;
LINTON, RW .
SOLAR CELLS, 1985, 13 (03) :301-307