ANNEALING EFFECT OF SNO2 FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION - EVIDENCE OF CHLORINE REMOVAL BY AUGER-ELECTRON SPECTROSCOPY AND RUTHERFORD BACKSCATTERING SPECTROMETRY STUDIES

被引：4

作者：

KIM, K ^{[1
]}

FINSTAD, TG ^{[1
]}

CHU, WK ^{[1
]}

COX, XB ^{[1
]}

LINTON, RW ^{[1
]}

机构：

[1] UNIV N CAROLINA,DEPT CHEM,CHAPEL HILL,NC 27514

来源：

SOLAR CELLS | 1985年 / 13卷 / 03期

关键词：

D O I：

10.1016/0379-6787(85)90023-7

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：301 / 307

页数：7

共 23 条

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JORDAN, AG ;

LUPIS, CHP ;

LONGINI, RL .

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[3]

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[5]

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[6] STRUCTURE OF INDIUM OXIDE TIN OXIDE TRANSPARENT CONDUCTING FILMS BY ELECTRON-DIFFRACTION AND ELECTRON SPECTROSCOPY [J].

BOSNELL, JR ;

WAGHORNE, R .

THIN SOLID FILMS, 1973, 15 (02) :141-148

[7]

CHOE MS, 1981, NEW PHYS, V21, P175

[8]

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[9]

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[10] MECHANISM OF CVD THIN-FILM SNO2 FORMATION [J].

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