THERMODYNAMIC ANALYSIS OF THE DEPOSITION OF SNO2 THIN-FILMS FROM THE VAPOR-PHASE

被引：29

作者：

ADVANI, GN

JORDAN, AG

LUPIS, CHP

LONGINI, RL

机构：

[1] CARNEGIE MELLON UNIV, CTR JOINING MAT, PITTSBURGH, PA 15213 USA

[2] CARNEGIE MELLON UNIV, DEPT MET & MAT SCI, PITTSBURGH, PA 15213 USA

来源：

THIN SOLID FILMS | 1979年 / 62卷 / 03期

关键词：

D O I：

10.1016/0040-6090(79)90012-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A thermodynamic analysis of the hydrolysis reaction between tin tetrachloride and water vapor indicates that the rate of deposition of SnO2 is a strong function of the temperature and the ratio of the reactants. Good agreement is observed between theoretically derived results and those obtained experimentally; this suggests that the reaction proceeds essentially under equilibrium conditions. Variations in morphology with changes in the growth temperatures are reported with a plausible explanation for the observed results. © 1979.

引用

页码：361 / 368

页数：8

共 11 条

[1] MECHANISM OF CVD THIN-FILM SNO2 FORMATION
GHOSHTAGORE, RN
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (01) : 110 - 117
[2] GLASSNER A, 1955, ANL5750 USAEC REP
[3] SOME THEOREMS ON THE FREE ENERGIES OF CRYSTAL SURFACES
HERRING, C
[J]. PHYSICAL REVIEW, 1951, 82 (01): : 87 - 93
[4] JARZEBSKI ZM, 1976, J ELECTROCHEM SOC, V123, pC199, DOI [10.1149/1.2133010, 10.1149/1.2132647, 10.1149/1.2133090]
[5] ELECTRICAL AND OPTICAL PROPERTIES OF SNO2-SI HETEROJUNCTIONS
KAJIYAMA, K
FURUKAWA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1967, 6 (07) : 905 - &
[6] Kirkwood J. G., 1961, CHEM THERMODYNAMICS
[7] MAISSEL LI, 1970, HDB THIN FILM TECHNO, P18
[8] ACCELERATED LIFE TESTS OF SNO2-SI HETEROJUNCTION SOLAR-CELLS
NASH, TR
ANDERSON, RL
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1977, 24 (04) : 468 - 472
[9] ELECTRICAL AND OPTICAL PROPERTIES OF SI-SNO2 HETEROJUNCTIONS
NISHINO, T
HAMAKAWA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1970, 9 (09) : 1085 - &
[10] OSAMU T, 1975, 5TH P C CHEM VAP DEP

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