SURFACE SMOOTHING EFFECTS OF THIN-FILM DEPOSITION

被引:23
作者
MCNEIL, JR [1 ]
WEI, LJ [1 ]
ALJUMAILY, GA [1 ]
SHAKIR, S [1 ]
MCIVER, JK [1 ]
机构
[1] UNIV NEW MEXICO,INST MODERN OPT,ALBUQUERQUE,NM 87131
来源
APPLIED OPTICS | 1985年 / 24卷 / 04期
关键词
D O I
10.1364/AO.24.000480
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:480 / 485
页数:6
相关论文
共 8 条
[1]  
Cho A. Y., 1975, Progress in Solid State Chemistry, V10, P157, DOI 10.1016/0079-6786(75)90005-9
[2]   RELATIONSHIP BETWEEN SURFACE SCATTERING AND MICROTOPOGRAPHIC FEATURES [J].
CHURCH, EL ;
JENKINSON, HA ;
ZAVADA, JM .
OPTICAL ENGINEERING, 1979, 18 (02) :125-136
[3]  
LEWIS B, 1978, NUCLEATION GROWTH TH
[4]   ION-BEAM APPLICATIONS FOR PRECISION INFRARED OPTICS [J].
MCNEIL, JR ;
HERRMANN, WC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :324-326
[5]  
MCNEIL JR, 1983, 15TH P ANN S OPT MAT
[6]  
STOVER JC, 1982, P SOC PHOTO-OPT INST, V362, P172
[7]  
STOVER JC, 1983, P SOC PHOTOOPT INSTR, V429
[8]  
Wehner G.K., 1970, HDB THIN FILM TECHNO