STUDY OF SURFACE ACOUSTIC-WAVES ON THE (110) PLANE OF GALLIUM-ARSENIDE

被引：12

作者：

BRIGHT, VM ^{[1
]}

KIM, Y ^{[1
]}

HUNT, WD ^{[1
]}

机构：

[1] GEORGIA INST TECHNOL,MICROELECTR RES CTR,ATLANTA,GA 30332

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 71卷 / 02期

关键词：

D O I：

10.1063/1.350412

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Piezoelectric semiconductors such as GaAs are of interest for signal processing devices due to the possibility of monolithic integration of surface-acoustic-wave (SAW) -based devices and active electronic circuits on the same substrate. The common crystal orientation of GaAs for these applications has been the {100} cut. In this paper the characteristics of surface wave propagation in the {110} plane of GaAs, which supports both the Rayleigh and the Bleustein-Gulyaev surface wave modes, are investigated. Several test devices have been fabricated and studied using laser probe and S-parameter measurement techniques. The SAW velocity, attenuation, piezoelectric coupling constant, slowness surface, beam profile, and the transducer characteristics have been measured, and the experimental results agree well with the theoretical calculations for both types of the surface wave modes.

引用

页码：597 / 605

页数：9

共 19 条

[11] EXCITATION AND DETECTION OF SURFACE SKIMMING BULK WAVES ON ROTATED Y-CUT QUARTZ
LEE, DL
[J]. IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1980, 27 (01): : 22 - 30
[12] LEWIS M, 1977, IEEE ULTRASONICS S P, P744
[13] ANALYSIS OF GENERATION AND DETECTION OF SURFACE AND BULK ACOUSTIC-WAVES BY INTERDIGITAL TRANSDUCERS
MILSOM, RF
REILLY, NHC
REDWOOD, M
[J]. IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1977, 24 (03): : 147 - 166
[14] Morgan D., 1985, STUDIES ELECT ELECT
[15] Rousseau K. V., 1982, 1982 Ultrasonics Symposium Proceedings, P279, DOI 10.1109/ULTSYM.1982.197829
[16] SLOBODNIK AL, 1973, MICROWAVE ACOUSTIC A, V1
[17] VOGEL RF, 1971, THESIS IOWA STATE U
[18] YAMAGUCHI M, 1982, ELECTRON LETT, V29, P261
[19] Yen K. H., 1979, 1979 Ultrasonics Symposium Proceedings, P776, DOI 10.1109/ULTSYM.1979.197311

← 1 2 →