ON THE CHARACTERIZATION OF A RF PARALLEL PLATE DISCHARGE

被引：11

作者：

OELERICHHILL, G

PUKROPSKI, I

KUJAWKA, M

机构：

[1] Institut für Experimentalphysik II, Ruhr-Universität Bochum, Bochum, D-4630

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1991年 / 24卷 / 04期

关键词：

D O I：

10.1088/0022-3727/24/4/010

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A parallel plate discharge, operated in argon in the pressure range p = 0.001 to 1 mbar, was investigated with a special interest on the mechanism of power deposition and on the electron energy distribution function (EEDF). Various diagnostic methods were used in combination in order to obtain a sufficient characterization of the discharge. The predominant channel of power flux was found to change with increasing pressure from Joule-type heating in the plasma bulk to heating by beam-like secondary electrons emitted by the powered electrode. Measured EEDFS differ from Maxwellians and change their shape along the discharge axis.

引用

页码：593 / 601

页数：9

共 18 条

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