INGAASP/INP MULTIPLE QUANTUM-WELLS GROWN BY GAS-SOURCE MOLECULAR-BEAM EPITAXY

被引:9
作者
HOU, HQ
TU, CW
机构
[1] Department of Electrical and Computer Engineering, University of California at San Diego, La Jolla
关键词
Molecular Beam Epitaxy - Photoluminescence - Semiconducting Indium Phosphide;
D O I
10.1016/0022-0248(92)90384-U
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We have grown In1-xGaxAsyP1-y/InP multiple quantum well structures with 1.3-mu-m excitonic absorption at room temperature by gas-source molecular beam epitaxy. In-situ composition determination in GaAs1-xPx and InAsxP1-x was carried out by measuring group-V-induced intensity oscillations of reflection high-energy electron diffraction. Based on the in-situ composition calibration for these ternary end members, Ga and As compositions in the quaternary compound, In1-xGaxAsyP1-y, were controlled successfully. Measurements by X-ray rocking curve, low-temperature photoluminescence and absorption spectroscopy indicate that high-quality In1-xGaxAsyP1-y/InP multiple quantum well samples were obtained.
引用
收藏
页码:167 / 171
页数:5
相关论文
共 18 条
[1]  
Casey H.C., 1978, HETEROSTRUCTURE LASE
[2]   HIGH-RESOLUTION X-RAY-DIFFRACTION OF INALAS/INP SUPERLATTICES GROWN BY GAS SOURCE MOLECULAR-BEAM EPITAXY [J].
CHANG, JCP ;
CHIN, TP ;
KAVANAGH, KL ;
TU, CW .
APPLIED PHYSICS LETTERS, 1991, 58 (14) :1530-1532
[3]   DETERMINATION OF V/III RATIOS ON PHOSPHIDE SURFACES DURING GAS SOURCE MOLECULAR-BEAM EPITAXY [J].
CHIN, TP ;
LIANG, BW ;
HOU, HQ ;
HO, MC ;
CHANG, CE ;
TU, CW .
APPLIED PHYSICS LETTERS, 1991, 58 (03) :254-256
[4]   GAS-SOURCE MOLECULAR-BEAM EPITAXY GROWTH OF HIGHLY STRAINED DEVICE QUALITY INASP/INP MULTIPLE QUANTUM-WELL STRUCTURES [J].
HOU, HQ ;
TU, CW ;
CHU, SNG .
APPLIED PHYSICS LETTERS, 1991, 58 (25) :2954-2956
[5]   INSITU DETERMINATION OF PHOSPHORUS COMPOSITION IN GAAS1-XPX GROWN BY GAS-SOURCE MOLECULAR-BEAM EPITAXY [J].
HOU, HQ ;
LIANG, BW ;
CHIN, TP ;
TU, CW .
APPLIED PHYSICS LETTERS, 1991, 59 (03) :292-294
[6]  
HOU HQ, IN PRESS APPL PHYS L, V60
[7]  
HOU HQ, IN PRESS MATER RES S, V228
[8]   ARSENIC-INDUCED INTENSITY OSCILLATIONS IN REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION MEASUREMENTS [J].
LEWIS, BF ;
FERNANDEZ, R ;
MADHUKAR, A ;
GRUNTHANER, FJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (02) :560-563
[9]  
LIANG BW, 1991, MATER RES SOC SYMP P, V222, P145, DOI 10.1557/PROC-222-145
[10]   DYNAMICS OF FILM GROWTH OF GAAS BY MBE FROM RHEED OBSERVATIONS [J].
NEAVE, JH ;
JOYCE, BA ;
DOBSON, PJ ;
NORTON, N .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 31 (01) :1-8