TIME-RESOLVED ELECTRON-ENERGY DISTRIBUTION FUNCTION MEASUREMENTS IN A LOW-FREQUENCY RF GLOW-DISCHARGE

被引：24

作者：

HOPKINS, MB

ANDERSON, CA

GRAHAM, WG

机构：

[1] UNIV ULSTER,DEPT PHYS,COLERAINE BT52 1SA,NORTH IRELAND

[2] QUEENS UNIV BELFAST,DEPT PHYS,BELFAST BT7 1NN,ANTRIM,NORTH IRELAND

来源：

EUROPHYSICS LETTERS | 1989年 / 8卷 / 02期

关键词：

D O I：

10.1209/0295-5075/8/2/006

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：141 / 145

页数：5

共 13 条

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[3]

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[6]

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[7] EVIDENCE FOR A TIME-DEPENDENT EXCITATION PROCESS IN SILANE RADIO-FREQUENCY GLOW-DISCHARGES [J].

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[8] LANGMUIR PROBE TECHNIQUE FOR PLASMA PARAMETER MEASUREMENT IN A MEDIUM DENSITY DISCHARGE [J].

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[9] ELECTRON-ENERGY DISTRIBUTION FUNCTION MEASUREMENTS IN A MAGNETIC MULTIPOLE PLASMA [J].

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[10]

KUSHNER MJ, 1986, IEEE T PLASMA SCI, V14, P78

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