LASER-INDUCED FLUORESCENCE OF OH AND SIO MOLECULES DURING THERMAL CHEMICAL VAPOR-DEPOSITION OF SIO2 FROM SILANE OXYGEN MIXTURES

被引：32

作者：

VANDEWEIJER, P

ZWERVER, BH

机构：

来源：

CHEMICAL PHYSICS LETTERS | 1989年 / 163卷 / 01期

关键词：

D O I：

10.1016/0009-2614(89)80009-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：48 / 54

页数：7

共 14 条

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