MECHANICAL-PROPERTIES OF COATED COPPER MIRRORS

被引:2
作者
SCAGLIONE, S
CANEVE, L
EMILIANI, G
机构
[1] Thin Film Laboratory, ENEA-Casaccia, 00060 Roma
关键词
D O I
10.1016/0042-207X(90)93941-B
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Copper mirrors are generally used in optical systems for handling CO2 laser beams. The presence of a protective coating on the mirror surface is necessary to increase the lifetime of mirrors working in a hostile environment. The mechanical properties (adhesion, hardness and abrasion) of Y2O3 and a-C:H protective thin films on copper mirrors have been investigated. Y2O3 and a-C:H coatings have been deposited by rf sputtering and dual ion beam sputtering, respectively. The coating adhesion has been measured by the 'scratch test' and the 'topple test', while the hardness has been measured with the knoop microindentation technique. In order to estimate the abrasion resistance of the samples, the 'eraser test' has been performed with a custom-made instrument. © 1990.
引用
收藏
页码:1305 / 1307
页数:3
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