LANGMUIR-BLODGETT ELECTRON-BEAM RESISTS

被引:19
作者
PETERSON, IR [1 ]
机构
[1] UNIV DURHAM,DEPT APPL PHYS & ELECTR,DURHAM DH1 3HP,ENGLAND
来源
IEE PROCEEDINGS-I COMMUNICATIONS SPEECH AND VISION | 1983年 / 130卷 / 05期
关键词
D O I
10.1049/ip-i-1.1983.0044
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
39
引用
收藏
页码:252 / 255
页数:4
相关论文
共 39 条
[1]   RADIATION-INDUCED SOLID-STATE POLYMERIZATION OF ORIENTED ULTRATHIN FILMS OF OCTADECYLACRYLAMIDE [J].
BANERJIE, A ;
LANDO, JB .
THIN SOLID FILMS, 1980, 68 (01) :67-75
[2]  
BARRAUD A, 1979, SOLID STATE TECHNOL, V22, P120
[3]   POLYMERIZED MONO-MOLECULAR LAYERS - A NEW CLASS OF ULTRATHIN RESINS FOR MICROLITHOGRAPHY [J].
BARRAUD, A ;
ROSILIO, C ;
RUAUDELTEIXIER, A .
THIN SOLID FILMS, 1980, 68 (01) :91-98
[4]   SOLID-STATE ELECTRON-INDUCED POLYMERIZATION OF OMEGA-TRICOSENOIC ACID MULTILAYERS [J].
BARRAUD, A ;
ROSILIO, C ;
RUAUDELTEIXIER, A .
JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1977, 62 (03) :509-523
[5]   POLYMERIZATION IN LANGMUIR-BLODGETT FILMS AND RESIST APPLICATIONS [J].
BARRAUD, A .
THIN SOLID FILMS, 1983, 99 (1-3) :317-321
[6]   RECENT IMPROVEMENTS IN MONO-MOLECULAR RESISTS [J].
BARRAUD, A ;
ROSILIO, C ;
RUAUDELTEIXIER, A .
THIN SOLID FILMS, 1980, 68 (01) :99-100
[7]  
BARRAUD A, 1981, THIN SOLID FILMS, V85, P75
[8]  
BARRAUD A, 1980, ELECTRON ION BEAM SC, P365
[9]  
BOWDEN MJ, 1979, SOLID STATE TECHNOL, P669
[10]  
Broers A. N., 1980, Microcircuit engineering, P1