SUB-MICRON LITHOGRAPHY TECHNIQUES

被引：2

作者：

LAWES, RA

机构：

来源：

关键词：

D O I：

10.1016/0169-4332(89)90943-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：485 / 499

页数：15

共 15 条

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[3]

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MOODY, RA ;

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[5]

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Heuberger A., 1985, Microelectronic Engineering, V3, P535, DOI 10.1016/0167-9317(85)90067-X

[10]

ONEILL F, 1987, MICROELECTRON ENG, V6, P287