EXCITED-STATES OF CF-4 PLASMA FOR POLYMERIZATION OF TMPTA MONOMER

The F and CF2-CF2+ excited states have been detected by emission spectroscopy in CF4RF plasmas used for TMPTA polymerization. These excited states are related through electron collision to F and CF2 ground states. The temporal variation of the F and CF2-CF2+ radiative states near the substrate reveals that the F atoms disappear first by incorporation in the monomer during the polymerization phase and, then, by a third body recombination process enhanced by the polymer surface. The CF2-CF2+ radiative states are varying as the inverse of the F states indicating a strong destruction mechanism of CF2 radicals by F atoms.