ULTRATHIN-FILM HARDNESS INVESTIGATIONS BY A MODIFIED ATOMIC-FORCE MICROSCOPE

被引：10

作者：

PERSCH, G ^{[1
]}

BORN, C ^{[1
]}

UTESCH, B ^{[1
]}

机构：

[1] FH WIESBADEN,D-65195 WIESBADEN,GERMANY

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1994年 / 59卷 / 01期

关键词：

68.55;

D O I：

10.1007/BF00348416

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have modified an atomic force microscope in order to determine the hardness of ultrathin films (10 nm) typically used in modern magnetic thin-film disk media.

引用

页码：29 / 32

页数：4

共 7 条

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