FREQUENCY-SHIFT ON A MICROMACHINED RESONATOR EXCITED PHOTOTHERMALLY IN VACUUM

被引：10

作者：

HANE, K ^{[1
]}

IWATUKI, T ^{[1
]}

INABA, S ^{[1
]}

OKUMA, S ^{[1
]}

机构：

[1] GIFU NATL COLL TECHNOL,DEPT ELECT ENGN,MOTOSU,GIFU 50104,JAPAN

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 07期

关键词：

D O I：

10.1063/1.1143271

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The photothermal activation of a micromachined resonator in vacuum is reported. The resonance frequency shift was obtained at the pressures in the viscosity flow region. This effect will be useful for the development of a miniature vacuum gauge operated optically.

引用

页码：3781 / 3782

页数：2

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