GROWTH AND CHARACTERIZATION OF BI12SIO20 FILMS BY METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引:10
作者
NAGAO, Y
MIMURA, Y
机构
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D O I
10.1109/JQE.1987.1073299
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:2152 / 2158
页数:7
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