HIGH-PERFORMANCE SMALL-TRACK-WIDTH METAL-IN-GAP HEADS MADE BY REACTIVE-ION ETCHING

被引：2

作者：

SILLEN, CWMP

RUIGROK, JJM

VEPREKHEIJMAN, MGJ

BODEFASSBENDER, AJG

GIESBERS, JB

机构：

[1] Philips Res. Lab.

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1990年 / 83卷 / 1-3期

关键词：

D O I：

10.1016/0304-8853(90)90426-Q

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Very-small-track-width ferrite and Metal-In-Gap (MIG) video heads were manufactured with the help of reactive-ion etching. Electrical measurements show very good read and write performance, as expected from theories. © 1990.

引用

页码：45 / 47

页数：3

共 6 条

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[3]

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IEEE TRANSACTIONS ON MAGNETICS, 1988, 24 (02) :1802-1804

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